Nikon | Semiconductor Lithography Systems | Lineup
An optical 5x reduction wafer stepper at ASML | Download Scientific Diagram
Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography : the diabolo effect - Lab on a Chip (RSC Publishing) DOI:10.1039/C1LC20810A
Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits | Microsystems & Nanoengineering